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Caltech Scientists Develops Method to Grow Nanoscale Arrays on Polymer Films
Monday, November 2, 2009 | Caltech

Scientists at the California Institute of Technology (Caltech) have uncovered the physical mechanism by which arrays of nanoscale (billionths-of-a-meter) pillars can be grown on polymer films with very high precision, in potentially limitless patterns.

This nanofluidic process-developed by Sandra Troian, Professor of Applied Physics, Aeronautics and Mechanical Engineering at Caltech, and described in a recent article in the journal Physical Review Letters, could someday replace conventional lithographic patterning techniques now used to build three-dimensional nano- and microscale structures for use in optical, photonic and biofluidic devices.

The fabrication of high-resolution, large-area nanoarrays relies heavily on conventional photolithographic patterning techniques, which involve treatments using ultraviolet light and harsh chemicals that alternately dissolve and etch silicon wafers and other materials. Photolithography is used to fabricate integrated circuits and microelectromechanical devices, for example.

However, the repeated cycles of dissolution and etching cause a significant amount of surface roughness in the nanostructures, ultimately limiting their performance.

"This process is also inherently two-dimensional, and thus three-dimensional structures must be patterned layer by layer," says Troian.

In an effort to reduce cost, processing time and roughness, researchers have been exploring alternative techniques whereby molten films can be patterned and solidified in situ, and in a single step.

About a decade ago, groups in Germany, China and the United States encountered a bizarre phenomenon while using techniques involving thermal gradients. When molten polymer nanofilms were inserted within a slender gap separating two silicon wafers that were held at different temperatures, arrays of nanoscale pillars spontaneously developed.

These protrusions grew until they reached the top wafer; the resulting pillars were typically several hundred nanometers high and several microns apart.

These pillars sometimes merged, forming patterns that looked like bicycle chains when viewed from above; in other films, the pillars grew in evenly spaced, honeycomb-like arrays. Once the system was brought back down to room temperature, the structures solidified in place to produce self-organized features.



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